Gas Delivery From bulk gas delivery to mixing, tool hookup, etching and testing, our high purity and ultra high purity products offer integrated solutions that work together seamlessly to increase throughput, ensure media purity, and reduce expensive downtime. They include the following:
Boosting efficiency, lowering cost at the fab
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Compact Ultrasonic Flow Meter
Applications: Liquid delivery, wafer cleaning, slurry Offers greatly increased accuracy (plus or minus 2% of reading)
Provides a higher turndown ratio. Handles higher concentration acids, slurries, and other typical semiconductor process fluids
HPX1 Series High Purity PFA Heat Exchanger for high resolution process temperature control
Application: Wafer cleaning Special PFA tubing enables high performance temperature control of chemicals. Transfers heat to surrounding fluids while ensuring process purity and safety through a leak-proof design.
NEW Ultra high purity, competitively priced FR Series regulators Applications: Valve manifold boxes, point-of-use tool hookup and gas cabinets Parker’s FR 1000 and FR 1400 Series of ultra high purity single-stage regulators provide precise, stable control of process gases in downstream point-of-use applications, reducing short- and long-term costs for semiconductor OEMs, integrators, and fab facilities.
For complete details, download the FR 1000 Series bulletin or FR 1400 Series bulletin.
NEW Cost-saving UHP Metal Face Seal and Weld Fittings Applications: Valve manifold boxes, gas cabinets and tool hookups Specifically designed for ultra high purity (UHP) semiconductor applications. Compact design allows for system miniaturization and close coupled spacing. Permanent heat code marking on wetted components provides full material traceability. All new products are available in SEMI F20 compliant material.
For complete details, download the UHP metal face seal and weld fittings bulletin.
NEW Corrosion-Resistant Series 22 Valves for wet etching and clean applications Applications: Wet etch and wafer cleaning New ultra clean manual and pneumatic valves offer increased flow and provide better seat sealing for enhanced leak-free performance and greater safety.
Deliver high cycle life in acids and slurry with reduced maintenance
Compact footprint with a true lock-out, tag-out design
Meet SEMI F57 standards
For complete details, download the 22 Series Valve (1/4" and 3/8") bulletinand 22 Series Valves (1/2" and 3/4") bulletin.
Download the Fluoropolymer Material and Chemical Compatibility Guide
High Cycle Speed Valve offers increased cycle life, greater reliability Applications: ALD, high speed switching for process gases The HCS1 Series is a UHP stainless steel diaphragm valve that performs up to 100 million cycles on cycle tests with a response time of less than 10 ms.
You asked. We delivered. New innovative products combine with our legendary legacy offerings to improve performance, productivity and profitability all over the fab.
Specialty and custom manifolds, welded assemblies, surface mounts, valve assemblies, and customer components
Tube and pipe fittings
Water spray gun
In-line static mixer
Thermocouple sensor assembly
6" diameter custom pressure vessels
Fluid Delivery Our fluid delivery products have been designed for use in high purity semiconductor fluid applications. They offer excellent resistance to aggressive chemicals, as well as maximum flow and high cycle life for less downtime and lower replacement costs. They include the following: